Standard guide to charge control and charge referencing techniques in X-ray photoelectron spectroscopy
全国半导体设备和材料标准化技术委员会(SAC/TC 203)
本标准规定了X射线光电子能谱（XPS）的荷电控制和荷电基准技术。
本标准适用于XPS荷电控制和荷电定位技术，不适用于其他电子激发系统。
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