Test method for measuring metallic impurities content in silicon materials used for photovoltaic applications by inductively coupled plasma mass spectrometry
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、材料分技术委员会(SAC/TC 203/SC 2)共同
本标准规定了利用电感耦合等离子体质谱仪(ICP—MS)测定光伏电池用硅材料中痕量体金属杂质含量的方法。
本标准适用于光伏电池用硅材料中痕量体金属杂质铁、铬、镍、铜、锌含量的测定。各元素的测量范围见表1。
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