$10
Vacuum technology—Test methods for leak rates of vacuum system
全国真空技术标准化技术委员会(SAC/TC 18)
本标准规定了利用氦质谱法和升压法对真空系统的漏率进行测试的测试原理、仪器与设备、测试条件、测试程序、漏率测试中断处理、测试记录与测试报告。
本标准适用于真空系统(以下简称被检件)的漏率测试。
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