Silicon powder—Determination of total carbon content—Infrared absorption method after combustion in an induction furnace
全国半导体设备和材料标准化技术委员会(SAC/TC 203)
本标准规定了利用感应炉燃烧后红外吸收法测定硅粉中总碳含量的方法。
本标准适用于生产多晶硅的原料硅粉中总碳含量的测定。测定范围为0.001%～1.0%（质量分数）。
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