Chinese Standard: GB/T 32814-2016

Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process

全国微机电技术标准化技术委员会(SAC/TC 336)

本标准规定了采用SOI硅片进行MEMS器件加工时应遵循的工艺要求和质量检验要求。
 本标准适用于硅基MEMS制造技术中基于SOI硅片的MEMS器件的加工和质量检验。

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