Silicon-based MEMS fabrication technology—Specification for criterion of the bulk silicon piezoresistance process
全国微机电技术标准化技术委员会(SAC/TC 336)
本标准规定了采用体硅压阻工艺进行MEMS器件加工时应遵循的工艺要求和质量检验要求。
本标准适用于硅基MEMS制造技术中基于背腔腐蚀和硅玻璃键合的体硅压阻加工工艺的加工和质量检验。
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