Chinese Standard: GB/T 32816-2016

Silicon-based MEMS fabrication technology—Specification for criterion of the combinationof the deep etching and bonding process

全国微机电技术标准化技术委员会(SAC/TC 336)

本标准规定了采用以深刻蚀与键合为核心的工艺集成进行MEMS器件加工时应遵循的工艺要求和质量检验要求。

本标准适用于基于以深刻蚀与键合为核心的工艺集成的加工和质量检验。

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