Measurement of nanofilm thickness on glass substrate —Profilometric method
全国纳米技术标准化技术委员会纳米材料分技术委员会(SAC/TC 279/SC 1)
本标准规定了用触针式轮廓仪法测量玻璃衬底上纳米薄膜厚度的原理、仪器要求、试验环境、要求、步骤及测试报告等。
本标准适用于玻璃衬底上厚度在10 nm～1 000 nm范围内的纳米薄膜厚度测量，且薄膜与衬底之间存在或可刻蚀出台阶。其他硬质平面衬底可参考本标准执行。
This standard is the original Chinese electronic standard.
If you need translation, please contact email: ChineseStandardsLibraryS001@gmail.com.
After you successfully purchase, we will send the electronic version of this standard to your email address
