Chinese Standard: GB/T 33922-2017

Wafer level test methods for MEMS piezoresistive pressure-sensitive die performances

全国微机电技术标准化技术委员会(SAC/TC 336)

本标准规定了MEMS压阻式压力敏感芯片（简称压力敏感芯片)的术语和定义、试验条件、试验的一般规定、试验内容和方法。

本标准适用于闭环和开环MEMS压阻式压力敏感芯片性能的圆片级试验。

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