$10
Test method for determining the orientation of sapphire single crystal
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分会(SAC/TC 203/SC 2)
本标准规定了采用X射线定向仪测定蓝宝石单晶晶向的方法。
本标准适用于测定表面取向大致平行于低指数晶面的蓝宝石单晶材料。
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