Verification method for Auger electron spectrometers
全国微束分析标准化技术委员会(SAC/TC 38)
本标准规定了俄歇电子能谱仪(Auger electron spectrometer)的检定方法。
本标准适用于激发源为电子束，且带有溅射清洁用离子枪的俄歇电子能谱仪。
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