Surface chemical analysis—X-ray photoelectron spectroscopy—Reporting of results of thin-film analysis
IDT ISO 13424:2013
全国微束分析标准化技术委员会(SAC/TC 38)
本标准给出了采用XPS对基材上薄膜的分析报告所需的最少信息量要求的说明。这些分析涉及化学组成和均匀薄膜厚度的测量，以及采用变角XPS、XPS溅射深度剖析、峰形分析和可变光子能量XPS的方式对非均匀薄膜作为深度函数的化学组成的测量。
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