Chinese Standard: GB/T 36969-2018

Nanotechnology—Method for the measurement of the nanofilm-thickness by atomic force microscopy

全国纳米技术标准化技术委员会(SAC/TC 279)

本标准规定了使用原子力显微术（AFM)测量纳米薄膜厚度的原理、测试条件、设备、样品、测试步骤和数据处理。

本标准适用于表面均匀、平整的纳米范围厚度的无机材料薄膜。较厚的和一些有机薄膜的膜厚测定也可参照执行。

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