$10
Test method for determination of crystal defect density in PV silicon ingot and wafer
全国半导体设备和材料标准化技术委员会(SAC/TC 203)
本标准规定了太阳能级多晶硅锭、硅片的晶体缺陷密度测定方法,包含方法概要、试剂和材料、仪器和设备、试样制备、测试步骤、数据处理、精密度、干扰因素和报告。
本标准适用于太阳能级多晶硅锭、硅片晶体缺陷密度的测定。
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