Chinese Standard: GB/T 37385-2019

Test method for chloride content of silicon—Ion chromatography method

全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分技术委员会(SAC/TC 203/SC 2)

本标准规定了硅中氯离子含量的离子色谱测定方法。
本标准适用于测定棒状、块状、颗粒状和片状硅中氯离子含量的测定。测定范围为1.0 μg/g至硅中氯离子的最大固溶度。

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