Chinese Standard: GB/T 37959-2019

Information model for containing process chamber IC equipment design

全国自动化系统与集成标准化技术委员会(SAC/TC 159)

本标准规定了含工艺腔室类集成电路装备建模仿真设计软件平台信息模型，规定了搭建含工艺腔室类集成电路装备建模仿真设计软件平台的一般性要求。
本标准适用于含工艺腔室类集成电路装备的建模仿真设计软件。

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