Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments
全国微机电技术标准化技术委员会(SAC/TC 336)
本标准规定了MEMS器件可靠性综合环境的试验方法和失效结果处理。
本标准适用于需要进行可靠性试验的MEMS器件。
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