Methods for chemical analysis of indium-tin oxide target
全国有色金属标准化技术委员会(SAC/TC 243)
本标准规定了氧化铟锡靶材中铟、锡、铁、铝、硅、铜、铅、镉、镍、铬和铊含量的测定方法。本标准适用于氧化铟锡靶材中铟、锡、铁、铝、硅、铜、铅、镉、镍、铬和铊含量的测定。各分析项目、方法、测定范围见表1。
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