Chinese Standard: GB/T 38446-2020

Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films

全国微机电技术标准化技术委员会(SAC/TC 336)

本标准规定了带状薄膜抗拉性能的试验方法及数据处理。

本标准适用于厚度在50 nm到数微米之间且长度和厚度的比值大于300的样品，也可用于MEMS产品带状薄膜结构的质量监控。

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