Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration
全国微机电技术标准化技术委员会(SAC/TC 336)
本标准规定了MEMS结构共振疲劳试验的试验方法，包括设备、试验环境、样品要求、试验条件和试验步骤。
本标准适用于MEMS结构的共振疲劳试验。
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