Measurement method for nano positioning and scanning stage based on flexure hinge mechanism and piezo actuator
全国电子测量仪器标准化技术委员会(SAC/TC 153)
本标准规定了基于柔性铰链机构和压电陶瓷驱动器的纳米定位与扫描平台（以下简称为平台）的测量条件、测量系统和测量方法。本标准适用于平台的研究、设计、生产、检测及使用。
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