Silicon tetrachloride for electronic industry
全国半导体设备和材料标准化技术委员会(SAC/TC 203)
本标准规定了电子工业用四氯化硅的技术要求、检验规则、试验方法、标志、包装、运输、储存及安全的要求。
本标准适用于工业四氯化硅精制提纯后的电子工业用四氯化硅。
This standard is the original Chinese electronic standard.
After you successfully purchase, we will send the electronic version of this standard to your email address.
If you have successfully purchased, please go to the plug-in category of the store and download the free plug-in installation package.
If you need translation, please contact email: ChineseStandardsLibraryS001@gmail.com.
