Test method for phosphorus content in polycrystalline silicon by zone-melting method under controlled atmosphere
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分会(SAC/TC 203/SC 2)
本标准规定了多晶硅中基磷含量的检验方法。
本标准适用于在硅芯上沉积生长的多晶硅棒中基磷含量（原子数)的测定，测定范围为0.01×1013 cm-3～500×1013 cm-3。
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