Chinese Standard: GB/T 5252-2006

Germanium monocrystal—Inspection of dislocation etch pit density

全国有色金属标准化技术委员会

本标准适用于位错密度0　cm-2～100　000 cm-2 的n型和p型锗单晶棒或片的位错密度或其他缺陷的测量。观察面为（111）、（100）和（113）面。

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