Chinese Standard: GB/T 6617-2009

Test method for measuring resistivity of silicon wafer using spreading resistance probe

全国半导体设备和材料标准化技术委员会材料分技术委员会

本标准规定了硅片电阻率的扩展电阻探针测量方法。
本标准适用于测量晶体晶向与导电类型已知的硅片的电阻率和测量衬底同型或反型的硅片外延层的电阻率，测量范围:10-3 Ω·cm～102 Ω·cm。

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