Chinese Standard: GB/T 6624-2009

Standard method for measuring the surface quality of polished silicon slices by visual inspection

全国半导体设备和材料标准化技术委员会材料分技术委员会

本标准规定了在一定光照条件下，用目测检验单晶抛光片（以下简称抛光片）表面质量的方法。
本标准适用于硅抛光片表面质量检验。外延片表面质量目测检验也可参考本方法进行。

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