Vacuum technology—Turbomolecular pumps—Measurement of performance characteristics
IDT ISO 5302:2003
全国真空技术标准化技术委员会(SAC/TC 18)
本标准规定了涡轮分子泵性能参数的测量方法，它适用于所有规格和所有型式的涡轮分子泵。
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