$10
Measuring thickness of epitaxial layers of gallium arsenide by infrared interference
全国有色金属标准化技术委员会
本标准适用于砷化镓外延片外延层厚度的测量,测量厚度大于2μm。要求衬底材料的电阻率小于0.02Ω·cm,外延层的电阻率大于0.1Ω·cm。
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