Test method for dislocation density of monocrystal gallium arsenide
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分技术委员会(SAC/TC 203/SC 2)
本标准规定了砷化镓单晶位错密度的测试方法。
本标准适用于{100}、{111}面砷化镓单晶位错密度的测试，测试范围为0 cm-2～100 000 cm-2。
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