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Nanotechnologies—Description, measurement and dimensional quality parameters of gratings
Scope of Application：
This document defines general terms for interpreting global and local quality parameters of gratings based on grating features and nominal position deviations. It provides a guide for the classification of measurement and evaluation methods used to determine these parameters and offers guidelines to ensure the quality of gratings in production and usage across different applications in nanotechnology. The methods defined and described in this document are applicable to various types of gratings; however, the document primarily focuses on one-dimensional (1D) and two-dimensional (2D) gratings. This focus facilitates use among manufacturers, users, and calibration laboratories involved in characterizing the dimensional quality parameters of gratings within the field of nanotechnology.
Basic information
Standard No：GB/Z 43684-2024
Standard Name： 纳米技术 光栅的描述、测量和尺寸质量参数
English Name：Nanotechnologies—Description, measurement and dimensional quality parameters of gratings
Standard Status：To be implemented
Release Date：2024-03-15
Effective Date：2024-10-01
Language of Publication：Simplified Chinese
Publication Information
Number of pages：36
Number of words：65 K
Other Information
Technical Committees：National Technical Committee for Standardization of Nanotechnology (SAC/TC 279)
Proposed Unit：Chinese Academy of Science
Application Dept：State Administration for Market Supervision and Administration, State Standardization Administration
