This standard is the Chinese version electronic standard. After you successfully purchase, we will send the electronic version of this standard to your email address. If you have any question, please contact email: ChineseStandardsLibraryS001@gmail.com.
Surface chemical analysis—Scanning probe microscopy—Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes(ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
Standard in brief
Scope of Application：
本文件描述了用于测量扫描电容显微镜（scanning capacitance microscope，SCM）或扫描扩展电阻显微镜（scanning spreading resistance microscope，SSRM）空间（横向）分辨的方法，该方法涉及使用锐边的器件。这2种显微镜广泛应用于半导体器件的载流子分布成像和其他电学特性的测量。
Basic information
Standard No：GB/T 43661-2024
Standard Name：表面化学分析 扫描探针显微术 用于二维掺杂物成像等用途的电扫描探针显微镜(ESPM,如SSRM和SCM)空间分辨的定义和校准
English Name：Surface chemical analysis—Scanning probe microscopy—Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes(ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
Standard Status：现行
Release Date：2024-03-15
Effective Date：2024-10-01
Language of Publication：中文简体
Standard Classification
ICS Number：71.040.40
CCS Number：G04
Related Standards
Referenced Standards：ISO 18115-2
Adopted Standards：ISO 13083:2015
Adopted Standard Name：《表面化学分析 扫描探针显微术 用于二维掺杂物成像等用途的电扫描探针显微镜(ESPM,如SSRM和SCM)空间分辨的定义和校准》
Adoption Level：IDT
Publication Information
Number of pages：20
Number of words：31 K
Format：大16
Edition：1
Color Pages：0
Electronic Version：Yes
Color Images：Yes
Print Publication Date：2024-03-01
Standard Revision Information
Has Amendment：No
Other Information
Application Dept：国家市场监督管理总局、国家标准化管理委员会
Standard Type：CN
Standard Attribute：GB
Other Standard Number：43661
Drafter：龚力、杨慕紫、陈瑜、张浩、谢伟广、谢方艳、丁喜冬、陈建
Drafting Organization：中山大学、广东工业大学、暨南大学
Management Organization：全国微束标准化技术委员会(SAC/TC 38)
Proposing Department：全国微束标准化技术委员会(SAC/TC 38)
