Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy.
全国微机电技术标准化技术委员会(SAC/TC 336)
本标准规定了拉曼光谱法测定微机电系统(MEMS)结构表面残余应力、相对静态应力、相对动态应力的方法。本标准适用于微机电系统(MEMS)结构表面残余应力、相对静态应力、相对动态应力的拉曼光谱法测试。
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